Product Introduction

GLPC-101 provides reliable on-line contamination monitoring for high purity gases under pipeline pressure (0.1 to 0.5 MPa).High-tech manufacturing processes often require high purity gases, this counter provides reliable in-line contamination monitoring of process gases at pipe pressure. The GLPC-101 uses the latest technology to monitor the cleanliness of the gas directly at high pressure without pressure relief from a separator or diffuser. It’s usually applied to specialized gases for semiconductor, electronics industry.

Product Features

• Can be used directly to test the compressed gas, no pressure separator or diffuser is needed
  ·6 particle channels
  · Sensitivity 0.1um at 0.1SCFM
  · input piped gas pressure from 0.1 to 0.5MPa
  · Semiconductor laser light source requires minimal maintenance
  · Designed for inert gases, easy to install
  · Precise particle size provided
  · Connecting to the host by communication protocol for comprehensive data storage, management, reporting and alerting

SPECIFICATIONS

particle sizevolumemaximum concentration limitgas typepressure rangecounting efficiencylight sourceoperation temperaturecommunicationsadapterprotection casemeasurementsweight